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Effect of buffer layer on VOx film fabrication by reactive RF sputtering

✍ Scribed by H. Miyazaki; I. Yasui

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 153 KB
Volume: 252
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2005.11.040

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