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Effect of annealing on CoSi2 thin films prepared by magnetron sputtering

✍ Scribed by Fanxiong Cheng; Chuanhai Jiang; Jiansheng Wu

Book ID
108215161
Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
93 KB
Volume
119
Category
Article
ISSN
0921-5107

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Preparation of MgB2 superconducting thin
Preparation of MgB2 superconducting thin films by magnetron sputtering
✍ R. Mičunek; A. Plecenik; P. KΓΊΕ‘; M. Zahoran; M. TomΓ‘Ε‘ek; T. Plecenik; M. Gregor; πŸ“‚ Article πŸ“… 2006 πŸ› Elsevier Science 🌐 English βš– 383 KB

Superconductor MgB 2 thin films with thickness 200 nm were prepared on sapphire substrates by co-deposition of boron and magnesium. Precursor MgB thin films were deposited from two independent magnetron sources-boron by rf magnetron sputtering and magnesium by dc magnetron sputtering. MgB precursor