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Effect of aluminum and indium co-doping on zinc oxide films prepared by dc magnetron sputtering

✍ Scribed by T. Tohsophon; N. Wattanasupinyo; B. Silskulsuk; N. Sirikulrat

Book ID: 113937128
Publisher: Elsevier Science
Year: 2011
Tongue: English
Weight: 919 KB
Volume: 520
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2011.06.079

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## Indium -doped zinc oxide (ZnO : In) films were prepared by simultaneous r.f. and d.c. magnetron sputtering. The structural, optical and electrical properties of the films have been obtained by x-ray diffractometry (XRD), Rutherford backscattering spectrometry (RBS), spectrophotometry and atomic