Structure and Internal Stress of Tin-Doped Indium Oxide and Indium–Zinc Oxide Films Deposited by DC Magnetron Sputtering

✍ Scribed by Nishimura, Eriko; Sasabayashi, Tomoko; Ito, Norihiro; Sato, Yasushi; Utsumi, Kentaro; Yano, Koki; Kaijo, Akira; Inoue, Kazuyoshi; Shigesato, Yuzo

• Book ID: 125492580
• Publisher: Institute of Pure and Applied Physics
• Year: 2007
• Tongue: English
• Weight: 379 KB
• Volume: 46
• Category: Article
• ISSN: 0021-4922
• DOI: 10.1143/JJAP.46.7806