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ECR-plasma assisted laser ablation of as-deposited superconducting thin films for application in microelectronics

✍ Scribed by Kristin Deneffe; Piet Van Mieghem; Bert Brijs; Wilfried Van Der Vorst; Robert Mertens; Gustaaf Borghs


Book ID
116017780
Publisher
Elsevier Science
Year
1990
Weight
481 KB
Volume
164-165
Category
Article
ISSN
0022-5088

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