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Application of the ERD method for hydrogen determination in silicon (oxy) nitride thin films prepared by ECR plasma deposition

✍ Scribed by L. Hrubčín; J. Huran; R. Šandrik; A.P. Kobzev; D.M. Shirokov

Book ID: 113285791
Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 345 KB
Volume: 85
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(94)95786-x

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