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[IEEE ICSE 2002. IEEE International Conference on Semiconductor Electronics. - Penang, Malaysia (19-21 Dec. 2002)] ICONIP '02. Proceedings of the 9th International Conference on Neural Information Processing. Computational Intelligence for the E-Age (IEEE Cat. No.02EX575) - High deposition rate thin film hydrogenated amorphous silicon prepared by d.c. plasma enhanced chemical vapour deposition of helium diluted silane

✍ Scribed by Roszairi, H.; Rahman, S.A.

Book ID: 126713167
Publisher: IEEE
Year: 2002
Weight: 245 KB
Category: Article
ISBN-13: 9780780375789
DOI: 10.1109/SMELEC.2002.1217830

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