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Dynamical behavior of the implant profile during ion implantation at elevated temperatures

✍ Scribed by A.M. Yacout; N.Q. Lam; J.F. Stubbins

Book ID: 113281497
Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 277 KB
Volume: 59-60
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(91)95174-c

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