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Dynamic measurements of depth profiles of hydrogen implanted into graphite at elevated temperatures

✍ Scribed by K. Morita; K. Ohtsuka; Y. Hasebe


Book ID
107810321
Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
638 KB
Volume
162-164
Category
Article
ISSN
0022-3115

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Nitrogen was implanted at an energy of 1 and 1.5 MeV up to concentrations of typically 0.1-1 at.% into various metals, semiconductors and polymers. The depth profiles were analysed by means of nuclear reaction analysis techniques with thermal neutrons and protons, and by secondary ion mass spectrome