Boron-induced redistribution of hydrogen implanted at elevated temperature into crystalline silicon

✍ Scribed by R.D. Verda; M. Nastasi; R.W. Bower

• Book ID: 114167194
• Publisher: Elsevier Science
• Year: 2003
• Tongue: English
• Weight: 144 KB
• Volume: 206
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(03)00863-2