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Plasma immersion ion implantation of pure aluminium at elevated temperatures

✍ Scribed by C. Blawert; B.L. Mordike

Book ID
114169094
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
532 KB
Volume
127-128
Category
Article
ISSN
0168-583X

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Ion implantation of nitrogen into samples of tempered and quenched H13 steel was carried out by plasma immersion technique. A glow discharge plasma of nitrogen species was the ion source and the negative high voltage pulser provided 10-12 kV, 60 ls duration and 1.0-2.0 kHz frequency, flat voltage pu