✦ LIBER ✦

Dry etching of SrBi2Ta2O9: Comparison of inductively coupled plasma chemistries

✍ Scribed by Jin Su Park; Tae Hee Kim; Chang Sun Choi; Yoon-Bong Hahn

Book ID: 110630009
Publisher: Springer US
Year: 2002
Tongue: English
Weight: 696 KB
Volume: 19
Category: Article
ISSN: 0256-1115
DOI: 10.1007/bf02697161

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

The surface reaction on SrBi2Ta2O9 thin

The surface reaction on SrBi2Ta2O9 thin films etched in Cl2/CF4/Ar inductively coupled plasma

✍ Dong-Pyo Kim; Chang-Il Kim 📂 Article 📅 2002 🏛 Elsevier Science 🌐 English ⚖ 627 KB

Inductively coupled plasma etching of II

Inductively coupled plasma etching of III–V semiconductors in Cl2-based chemistries

✍ J.W Lee; E.S Lambers; C.R Abernathy; S.J Pearton; R.J Shul; F Ren; W.S Hobson; C 📂 Article 📅 1998 🏛 Elsevier Science 🌐 English ⚖ 881 KB

Spark-plasma-sintering of bulk SrBi2Ta2O

Spark-plasma-sintering of bulk SrBi2Ta2O9materials

✍ Baorang Li; Xiaohui Wang; Xiuquan Han; Xiwei Qi; Longtu Li 📂 Article 📅 2004 🏛 Springer 🌐 English ⚖ 201 KB

Dry etching of germanium using inductive

Dry etching of germanium using inductively coupled Ar/CCl2F2/Cl2plasma

✍ Taek Sung Kim; Sang-Sik Choi; Mi Im Shin; Tae Soo Jeong; Sukil Kang; Chel-Jong C 📂 Article 📅 2010 🏛 The Korean Institute of Metals and Materials 🌐 English ⚖ 611 KB

Defect Chemistry of SrBi2Ta2O9and Ferroe

Defect Chemistry of SrBi2Ta2O9and Ferroelectric Fatigue Endurance

✍ A.C. Palanduz; D.M. Smyth 📂 Article 📅 2000 🏛 Springer US 🌐 English ⚖ 139 KB

Effects of O2 annealing after etching Sr

Effects of O2 annealing after etching SrBi2Ta2O9 thin film in Cl2/CF4/Ar plasma

✍ Dong-Pyo Kim; Chang-Il Kim; Byoung-Gon Yu 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 511 KB