Dry Etching for VLSI

✍ Scribed by A.J. van Roosmalen, J.A.G. Baggerman, S.J.H. Brader

Publisher: Springer
Year: 1991
Tongue: English
Leaves: 260
Edition: 1
Category: Library

⬇ Acquire This Volume

No coin nor oath required. For personal study only.

✦ Synopsis

This volume is dedicated to the field of dry (plasma) etching, as applied in silicon semiconductor processing.

✦ Subjects

Приборостроение;Полупроводниковые приборы;

📜 SIMILAR VOLUMES

Dry Etching for Microelectronics

📁 Dry Etching for Microelectronics

✍ RONALD A. POWELL (Eds.) 📂 Library 📅 1984 🏛 Elsevier Science Ltd 🌐 English

This volume collects together for the first time a series of in-depth, critical reviews of important topics in dry etching, such as dry processing of III-V compound semiconductors, dry etching of refractory metal silicides and dry etching aluminium and aluminium alloys. This topical format provides

Dry Etching Technology for Semiconductor

📁 Dry Etching Technology for Semiconductors

✍ Kazuo Nojiri (auth.) 📂 Library 📅 2015 🏛 Springer International Publishing 🌐 English

<p>This book is a must-have reference to dry etching technology for semiconductors, which will enable engineers to develop new etching processes for further miniaturization and integration of semiconductor integrated circuits. The author describes the device manufacturing flow, and explains in which

Plasma Etching Processes for Interconnec

📁 Plasma Etching Processes for Interconnect Realization in VLSI

✍ Nicolas Posseme 📂 Library 📅 2015 🏛 Elsevier 🌐 English

This is the first of two books presenting the challenges and future prospects of plasma etching processes for microelectronics, reviewing the past, present and future issues of etching processes in order to improve the understanding of these issues through innovative solutions.<br><br>This book focu

Plasma Etching Processes for Interconnec

📁 Plasma Etching Processes for Interconnect Realization in VLSI

✍ Nicolas Posseme 📂 Library 📅 2015 🏛 Elsevier 🌐 English

Crystal Growth and Evaluation of Silicon

📁 Crystal Growth and Evaluation of Silicon for VLSI and ULSI

✍ Golla Eranna 📂 Library 📅 2014 🏛 CRC Press 🌐 English

<P>Silicon, as a single-crystal semiconductor, has sparked a revolution in the field of electronics and touched nearly every field of science and technology. Though available abundantly as silica and in various other forms in nature, silicon is difficult to separate from its chemical compounds becau

Crystal growth and evaluation of silicon

📁 Crystal growth and evaluation of silicon for VLSI and ULSI

✍ G Eranna 📂 Library 📅 2014 🏛 CRC Press 🌐 English