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Droplet target for low-debris laser-plasma soft X-ray generation

✍ Scribed by L. Rymell; H.M. Hertz


Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
548 KB
Volume
103
Category
Article
ISSN
0030-4018

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Low debris laser plasma soft X-ray source is of great importance to micro-lithography and microscopy. In this paper, a 1.06 mm YAG laser with 2 J energy, 10 ns duration is employed to irradiate a CO 2 cryogenic target. Soft X-ray spectra from the CO 2 cryogenic target are obtained. Experimental resu