A low debris laser plasma soft X-ray source

✍ Scribed by Jingquan Lin; Xiaowei Song; Bo Chen; Jianlin Cao

• Publisher: Elsevier Science
• Year: 2000
• Tongue: English
• Weight: 141 KB
• Volume: 32
• Category: Article
• ISSN: 0030-3992
• DOI: 10.1016/s0030-3992(00)00026-8

✦ Synopsis

Low debris laser plasma soft X-ray source is of great importance to micro-lithography and microscopy. In this paper, a 1.06 mm YAG laser with 2 J energy, 10 ns duration is employed to irradiate a CO 2 cryogenic target. Soft X-ray spectra from the CO 2 cryogenic target are obtained. Experimental results of debris measurement from both CO 2 cryogenic and Cu targets demonstrate that the light source based on the CO 2 cryogenic target shows great improvement over conventional metal targets in debris reduction.