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Dose rate effects on the dynamic annealing mechanism in P+ -implanted silicon

โœ Scribed by Berti, M. ;Drigo, A. V. ;Lulli, G. ;Merli, P. G. ;Antisari3, M. Vittori


Book ID
105379398
Publisher
John Wiley and Sons
Year
1986
Tongue
English
Weight
734 KB
Volume
97
Category
Article
ISSN
0031-8965

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