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Doping of epitaxial silicon: Equilibrium gas phase and doping mechanism

✍ Scribed by P. Rai-Choudhury; E.I. Salkovitz

Publisher: Elsevier Science
Year: 1970
Tongue: English
Weight: 723 KB
Volume: 7
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(70)90063-1

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