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Hydrogen in gas phase and ion implantation doped amorphous silicon

✍ Scribed by F.J. Demond; G. Müller; S. Kalbitzer; W.E. Spear; P.G. Le Comber


Publisher
Elsevier Science
Year
1981
Weight
237 KB
Volume
191
Category
Article
ISSN
0167-5087

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