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Dopant diffusion and segregation in semiconductor heterostructures: Part III, diffusion of Si into GaAs

✍ Scribed by Chen, C.-H.; Gösele, U.M.; Tan, T.Y.

Book ID
113035182
Publisher
Springer
Year
1999
Tongue
English
Weight
184 KB
Volume
69
Category
Article
ISSN
1432-0630

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