Dopant diffusion and segregation in semiconductor heterostructures: Part 2. B in GexSi1-x/Si structures

✍ Scribed by C.-H. Chen; U.M. Gösele; T.Y. Tan

• Publisher: Springer
• Year: 1999
• Tongue: English
• Weight: 266 KB
• Volume: 68
• Category: Article
• ISSN: 1432-0630
• DOI: 10.1007/s003390050848