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Directed ion beam sputter etching of polytetrafluoroethylene (Teflon) using an argon ion source

✍ Scribed by C.E. Garner; S.B. Gabriel; Y.S. Kuo


Book ID
107864053
Publisher
Elsevier Science
Year
1982
Tongue
English
Weight
995 KB
Volume
95
Category
Article
ISSN
0040-6090

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