Reactive ion beam etching studies of tungsten with CF4/argon mixtures using ion scattering spectroscopy and SIMS

✍ Scribed by TI Cox; VGI Deshmukh; DG Armour

• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 254 KB
• Volume: 39
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(89)91115-9