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Direct patterning of self assembled nano-structures of block copolymers via electron beam lithography

✍ Scribed by Bo Kyung Yoon; Wonseok Hwang; Youn Jung Park; Jiyoung Hwang; Cheolmin Park; Joonyeon Chang

Publisher
The Polymer Society of Korea
Year
2005
Tongue
English
Weight
457 KB
Volume
13
Category
Article
ISSN
1598-5032

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