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One-Step Direct-Patterning Template Utilizing Self-Assembly of POSS-Containing Block Copolymers

✍ Scribed by Tomoyasu Hirai; Melvina Leolukman; Chi Chun Liu; Eungnak Han; Yun Jun Kim; Yoshihito Ishida; Teruaki Hayakawa; Masa-aki Kakimoto; Paul F. Nealey; Padma Gopalan

Publisher: John Wiley and Sons
Year: 2009
Tongue: English
Weight: 544 KB
Volume: 21
Category: Article
ISSN: 0935-9648
DOI: 10.1002/adma.200900518

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