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Diffusion of Copper in Nanoporous Dielectric Films

✍ Scribed by Rodriguez, Oscar; Saxena, Ravi; Cho, Woojin; Plawsky, Joel L.; Gill, William N.


Book ID
126329903
Publisher
American Chemical Society
Year
2005
Tongue
English
Weight
102 KB
Volume
44
Category
Article
ISSN
0888-5885

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