Water diffusion and fracture behavior in nanoporous low-k dielectric film stacks

✍ Scribed by Li, Han; Tsui, Ting Y.; Vlassak, Joost J.

• Book ID: 127067238
• Publisher: American Institute of Physics
• Year: 2009
• Tongue: English
• Weight: 677 KB
• Volume: 106
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.3187931