✦ LIBER ✦
SPIE Proceedings [SPIE Microelectronic Manufacturing - Santa Clara, CA (Monday 18 September 2000)] Challenges in Process Integration and Device Technology - Thickness-dependent optical and dielectric behaviors of low-k polymer thin films
✍ Scribed by Kim, Hyungkun; Shi, Frank G.; Zhao, Bin; Brongo, Maureen R.; Burnett, David; Kimura, Shin'ichiro; Singh, Bhanwar
- Book ID
- 121493295
- Publisher
- SPIE
- Year
- 2000
- Weight
- 189 KB
- Volume
- 4181
- Category
- Article
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