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Diffusion of boron and arsenic in molybdenum disilicide films

✍ Scribed by S. Solmi; R. Angelucci; G. Cicognani; R. Canteri

Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 332 KB
Volume: 53
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(91)90261-h

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