✦ LIBER ✦
Range distributions of ion implanted boron, phosphorus and arsenic dopants in thermally reacted titanium silicide thin films
✍ Scribed by G.M. Crean; P.D. Cole; C. Jeynes
- Publisher
- Elsevier Science
- Year
- 1990
- Tongue
- English
- Weight
- 276 KB
- Volume
- 33
- Category
- Article
- ISSN
- 0038-1101
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