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Differential sheet resistivity of mixed implanted (phosphorus + boron) silicon

✍ Scribed by Anil Kumar; G.S. Virdi; P.J. George; S.K. Chattopadhyaya; N. Nath

Publisher: Elsevier Science
Year: 1998
Tongue: English
Weight: 415 KB
Volume: 29
Category: Article
ISSN: 0026-2692
DOI: 10.1016/s0026-2692(97)00024-4

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