✦ LIBER ✦
Sheet resistance variations of phosphorus implanted silicon at elevated temperatures : D. G. Beanland, W. Temple and D. J. Chivers. Solid-St. Electron. 21, 357 (1978)
- Publisher
- Elsevier Science
- Year
- 1978
- Tongue
- English
- Weight
- 68 KB
- Volume
- 17
- Category
- Article
- ISSN
- 0026-2714
No coin nor oath required. For personal study only.