✦ LIBER ✦
Stripping Hall effect, sheet and spreading resistance techniques for electrical evaluation of implanted silicon layers
✍ Scribed by Jumana Boussey
- Publisher
- Elsevier Science
- Year
- 1998
- Tongue
- English
- Weight
- 781 KB
- Volume
- 40
- Category
- Article
- ISSN
- 0167-9317
No coin nor oath required. For personal study only.
✦ Synopsis
The objective of this chapter is to address the electrical characterization of silicon implanted layer. The determination of the electrical activity profiles, in terms of free carriers concentration and mobility, is described using spreading resistance and stripping Hall effect techniques. Several recent results are presented in order to show the importance of such experimental analysis