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Dielectric properties of rf sputtered Ta 2 O 5 on rapid thermally nitrided Si

✍ Scribed by Novkovski, N; Paskaleva, A; Atanassova, E

Book ID: 121474031
Publisher: Institute of Physics
Year: 2005
Tongue: English
Weight: 161 KB
Volume: 20
Category: Article
ISSN: 0268-1242
DOI: 10.1088/0268-1242/20/2/023

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