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Dielectric properties of anodized Al-Ta alloy films with high Al content

✍ Scribed by A. Schauer; M. Roschy; W. Juergens

Publisher
Elsevier Science
Year
1975
Tongue
English
Weight
948 KB
Volume
27
Category
Article
ISSN
0040-6090

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In order to obtain thin-film capacitors with high heat resistance and high reliability, we have investigated the preparation conditions of stoichiometric Al 3 Hf intermetallic compound film and the capacitor properties and leakage current of Al 3 Hf anodized capacitors. The effect of reduction of ox