Anodization of Al3Zr intermetallic compound film and its application to the preparation of thin-film capacitors with high reliability

A study on the thin-film capacitor with

A study on the thin-film capacitor with high heatproof property and high reliability by using anodized film of Al3Hf intermetallic compound

✍ Masahiko Ozeki; Misao Yamane; Katsutaka Sasaki; Yoshio Abe; Hideto Yanagisawa; M 📂 Article 📅 1999 🏛 John Wiley and Sons 🌐 English ⚖ 139 KB

In order to obtain thin-film capacitors with high heat resistance and high reliability, we have investigated the preparation conditions of stoichiometric Al 3 Hf intermetallic compound film and the capacitor properties and leakage current of Al 3 Hf anodized capacitors. The effect of reduction of ox