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Dielectric and semiconducting Ge-C and Si-C thin films prepared by plasma deposition from organic compounds

✍ Scribed by J. Tyczkowski; P. Kazimierski; E. Odrobina

Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 313 KB
Volume: 60
Category: Article
ISSN: 0257-8972
DOI: 10.1016/0257-8972(93)90162-h

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