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Diagnostic of 13.56 MHz RF sustained Ar–N 2 plasma by optical emission spectroscopy

✍ Scribed by Khan, F. U.; Rehman, N. U.; Naseer, S.; Naveed, M. A.; Qayyum, A.; Khattak, N. A.D.; Zakaullah, M.

No coin nor oath required. For personal study only.

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