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Determination of the electron temperature by optical emission spectroscopy in a 13.56 MHz dusty methane plasma: Influence of the power

✍ Scribed by Massereau-Guilbaud, Véronique; Géraud-Grenier, Isabelle; Plain, André


Book ID
120836139
Publisher
American Institute of Physics
Year
2009
Tongue
English
Weight
432 KB
Volume
106
Category
Article
ISSN
0021-8979

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