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Electron Temperature and Density of the Plasma Measured by Optical Emission Spectroscopy in VLPPS Conditions

✍ Scribed by N. Zhang; F. Sun; L. Zhu; M. P. Planche; H. Liao; C. Dong; C. Coddet


Book ID
107462524
Publisher
Springer US
Year
2011
Tongue
English
Weight
473 KB
Volume
20
Category
Article
ISSN
1059-9630

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