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Development of optical coatings for 157-nm lithography I Coating materials

✍ Scribed by Niisaka, Shunsuke ;Saito, Tadahiko ;Saito, Jun ;Tanaka, Akira ;Matsumoto, Akira ;Otani, Minoru ;Biro, Ryuji ;Ouchi, Chidane ;Hasegawa, Masanobu ;Suzuki, Yasuyuki ;Sone, Kazuho

Book ID: 115350033
Publisher: The Optical Society
Year: 2002
Tongue: English
Weight: 606 KB
Volume: 41
Category: Article
ISSN: 1559-128X
DOI: 10.1364/AO.41.003242

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