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Development of optical coatings for 157-nm lithography II Reflectance, absorption, and scatter measurement

✍ Scribed by Otani, Minoru ;Biro, Ryuji ;Ouchi, Chidane ;Hasegawa, Masanobu ;Suzuki, Yasuyuki ;Sone, Kazuho ;Niisaka, Shunsuke ;Saito, Tadahiko ;Saito, Jun ;Tanaka, Akira ;Matsumoto, Akira

Book ID: 115350034
Publisher: The Optical Society
Year: 2002
Tongue: English
Weight: 773 KB
Volume: 41
Category: Article
ISSN: 1559-128X
DOI: 10.1364/AO.41.003248

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