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Optical-gradient antireflective coatings for 157-nm optical lithography applications

✍ Scribed by Chen, Hsuen-Li ;Fan, Wonder ;Wang, Tzyy-Jyann ;Ko, Fu-Hsiung ;Zhai, Run-Sheng ;Hsu, Chien-Kui ;Chuang, Tung-Jung

No coin nor oath required. For personal study only.

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