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Development of Ferrite-Enhanced Side-Type Inductively Coupled Plasma

✍ Scribed by Bang, Jin-Young; Chung, ChinWook

Book ID: 111883914
Publisher: IEEE
Year: 2011
Tongue: English
Weight: 217 KB
Volume: 39
Category: Article
ISSN: 0093-3813
DOI: 10.1109/tps.2011.2132764

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