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Design of a magnetic-pole enhanced inductively coupled plasma source

✍ Scribed by Meziani, T; Colpo, P; Rossi, F

Book ID: 111963072
Publisher: Institute of Physics
Year: 2001
Tongue: English
Weight: 229 KB
Volume: 10
Category: Article
ISSN: 0963-0252
DOI: 10.1088/0963-0252/10/2/317

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