✦ LIBER ✦
Dry etching of ITO by magnetic pole enhanced inductively coupled plasma for display and biosensing devices
✍ Scribed by T. Meziani; P. Colpo; V. Lambertini; G. Ceccone; F. Rossi
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 579 KB
- Volume
- 252
- Category
- Article
- ISSN
- 0169-4332
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