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Determination of thickness and roughness of thin copper films by X-Ray diffraction measurements

✍ Scribed by K. Häupl; P. Wißmann

Book ID: 112357422
Publisher: Springer
Year: 1983
Tongue: English
Weight: 218 KB
Volume: 314
Category: Article
ISSN: 1618-2650
DOI: 10.1007/bf00516835

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