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Determination of the Al content in thin AlxGa1−x layers by SIMS

✍ Scribed by K.T.F. Janssen; A.F. de Jong

Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 97 KB
Volume: 27
Category: Article
ISSN: 0304-3991
DOI: 10.1016/0304-3991(89)90119-8

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