✦ LIBER ✦

Determination of the Absolute Thickness of Ultrathin Al 2 O 3 Overlayers on Si (100) Substrate

✍ Scribed by Kim, Kyung Joong; Jang, Jong Shik; Lee, Joo-Hee; Jee, Yun-Jung; Jun, Chung-Sam

Book ID: 118035237
Publisher: American Chemical Society
Year: 2009
Tongue: English
Weight: 235 KB
Volume: 81
Category: Article
ISSN: 0003-2700
DOI: 10.1021/ac901463m

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Study of Al2O3 condensation on Si(100) a

Study of Al2O3 condensation on Si(100) and InP(100) substrates

✍ L. Bideux; C. Robert; B. Gruzza; V. Matolin; Z. Benamara 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 246 KB

Atomic Layer Deposition Growth Reactions

Atomic Layer Deposition Growth Reactions of Al 2 O 3 on Si(100)-2×1

✍ Halls, Mathew D.; Raghavachari, Krishnan 📂 Article 📅 2004 🏛 American Chemical Society 🌐 English ⚖ 103 KB

Interaction of Water with Ordered θ-Al 2

Interaction of Water with Ordered θ-Al 2 O 3 Ultrathin Films Grown on NiAl(100)

✍ Ozensoy, Emrah; Szanyi, János; Peden, Charles H. F. 📂 Article 📅 2005 🏛 American Chemical Society 🌐 English ⚖ 297 KB

High-resolution depth profiling in ultra

High-resolution depth profiling in ultrathin Al[sub 2]O[sub 3] films on Si

✍ Gusev, E. P.; Copel, M.; Cartier, E.; Baumvol, I. J. R.; Krug, C.; Gribelyuk, M. 📂 Article 📅 2000 🏛 American Institute of Physics 🌐 English ⚖ 434 KB

Fabrication of GaN epitaxial films on Al

Fabrication of GaN epitaxial films on Al2O3/Si (001) substrates

✍ Lianshan Wang; Xianglin Liu; Yude Zan; Du Wang; Jun Wang; Dacheng Lu; Zhanguo Wa 📂 Article 📅 1998 🏛 SP Science China Press 🌐 English ⚖ 614 KB

Dielectric characteristics of Al[sub 2]O

Dielectric characteristics of Al[sub 2]O[sub 3]–HfO[sub 2] nanolaminates on Si(100)

✍ Cho, M.-H.; Roh, Y. S.; Whang, C. N.; Jeong, K.; Choi, H. J.; Nam, S. W.; Ko, D. 📂 Article 📅 2002 🏛 American Institute of Physics 🌐 English ⚖ 406 KB