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Determination of optical constants and stoichiometry of BxOyNz films deposited by ECR-PVD

✍ Scribed by Badi, N.; Morales, M.; Boney, C.; Bensaoula, A.; Zomorrodian, A.

Book ID
122276824
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
627 KB
Volume
382
Category
Article
ISSN
0022-3093

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## Abstract The effect of bias voltage on characteristics of ZnO thin films deposited by the electron cyclotron resonance plasma‐enhanced chemical vapor deposition (ECR‐PECVD) method was investigated. The structural, optical and electrical properties of ZnO thin films were studied as a function of