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Determination of effective electron inelastic mean free paths in SiO2 and Si3N4 using a Si reference

✍ Scribed by R Jung; J.C Lee; G.T Orosz; A Sulyok; G Zsolt; M Menyhard

Book ID: 108278760
Publisher: Elsevier Science
Year: 2003
Tongue: English
Weight: 129 KB
Volume: 543
Category: Article
ISSN: 0039-6028
DOI: 10.1016/j.susc.2003.08.005

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